Pedestal Waveguide Resonators for Enhanced Sensing

Technology #17534

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Inventors
Jurgen Michel
Materials Processing Center, MIT
External Link (dmse.mit.edu)
Anuradha Agarwal
Materials Processing Center, MIT
External Link (photonics.mit.edu)
Pao Tai Lin
Materials Processing Center, MIT
Managed By
Dave Sossen
MIT Technology Licensing Officer
Patent Protection

Methods and Apparatus for Pedestal Ring Resonators

PCT Patent Application WO 2016-086090

Applications

Applications for this technology are found in single chip sensors.

Problem Addressed

Current attempts to detect chemical or biological agents on a single chip have difficulty integrating all elements to achieve a sensor with high signal-to-noise and a small footprint: sensors, waveguides, and photodetectors.

Technology

The invention is a new waveguide geometry that enhances the interaction between the agent and light, and increases signal strength for on-chip detection.

Advantages

  • Small footprint and high sensitivity
  • CMOS compatible fabrication