Low Loss Superconducting Integrated Circuits (LLSICs)

Technology #18087

Questions about this technology? Ask a Technology Manager

Download Printable PDF

Image Gallery
Photograph of superconducting qubit circuit
Categories
Inventors
Vladimir Bolkhovsky
Lincoln Laboratory, MIT
External Link (www.ll.mit.edu)
Rabindra Das
Lincoln Laboratory, MIT
External Link (www.ll.mit.edu)
Mark Gouker
Lincoln Laboratory, MIT
External Link (www.ll.mit.edu)
David Hover
Lincoln Laboratory, MIT
External Link (www.ll.mit.edu)
Xhovalin Miloshi
Lincoln Laboratory, MIT
External Link (www.ll.mit.edu)
William Oliver
Lincoln Laboratory, MIT
External Link (www.ll.mit.edu)
Danna Rosenberg
Lincoln Laboratory, MIT
External Link (www.ll.mit.edu)
Corey Stull
Lincoln Laboratory, MIT
External Link (www.ll.mit.edu)
Jonilyn Yoder
Lincoln Laboratory, MIT
External Link (www.ll.mit.edu)
Managed By
Dave Sossen
MIT Technology Licensing Officer
Patent Protection

Low Loss Superconducting Integrated Circuits (LLSICs)

PCT Patent Application Filed
Publications
A near–quantum-limited Josephson traveling-wave parametric amplifier
Science, 350 (6258): 307-10, Oct. 16, 2015
Study of loss in superconducting coplanar waveguide resonators
Journal of Applied Physics, 109 (063915):1- 10, Mar. 24, 2011
Inductance of Circuit Structures for MIT LL Superconductor Electronics Fabrication Process With 8 Niobium Layers
IEEE Transactions on Applied Superconductivity, 25(3):1-5, Jun. 2015

Applications

  • High-performance electronics
  • Superconducting devices
  • Integration of heterogeneous technologies and components on same chip

Problem Addressed

Quantum computers are an emergent technology, offering vast amounts of computational power. Superconducting quantum circuits—a leading candidate technology for large-scale quantum computing—require long signal coherence times to optimize fault tolerance. Currently, superconducting qubit coherence time improvements are being driven by design changes to superconducting materials, such as titanium nitride (TiN) superconducting coplanar waveguide resonators with high intrinsic quality factors. A major technical challenge is the wafer material. To be effective, qubit applications require materials with high intrinsic quality factors, near stoichiometric composition across wafers, wafer to wafer reproducibility, stability of milli-Kelvine temperature ranges and scalability.  

Technology

The technology is a low-loss superconducting integrated circuit which exhibits all of the characteristics desired in qubit systems. The invention includes an integrated approach to developing flip-chip superconducting interconnects for 3D constructions on various qubit die package configurations. It is capable of depositing High Q TiN on 8” wafer and is capable of generating High Q from various TiN film thicknesses. This versatile invention has been proven effective on a variety of instrumentation systems, enabling easy integration of heterogeneous technologies and components on the same chip.

Advantages

  • Flexibility: TiN SCPW resonators with high internal quality factors fabricated from two sputtering systems
  • Excellent cross-wafer and wafer to wafer reproducibility
  • Easy integration of heterogeneous technologies and components on same chip