- Low cost LED fabrication and single and multi-junction solar cells
- Epitaxial film production for various electronic and photonic devices such as lasers
Epitaxial films, crystalline films deposited on a crystalline substrate, are vital for commercial fabrication of electronics. Epitaxial films must be formed on specific substrates, which are often expensive, in order to avoid lattice mismatch. Lattice mismatch can cause defects in and degradation of the electrical and optical properties of epitaxial films. In addition, the substrates cannot be reused as the process for removing epitaxial films degrades the substrates. The need to purchase a new substrate for each epitaxial film constructed dramatically inflates the cost of film production.
The invention is a method for epitaxial film production without the degradation of the substrate. The expensive substrates are protected from degradation in both the epitaxial film deposition phase and the removal phase, thereby ensuring that the substrate can be reused in the production of additional films. Thus, the cost of epitaxial film production is dramatically reduced by enabling a single substrate to be used in the production of multiple epitaxial films.
- Inexpensive method for constructing epitaxial films
- Reusability of expensive substrates ensured in the epitaxial film production process