Graphene-Based Layer Transfer Process for Advanced Cost-Efficient Electronics/Photonics

Technology #18178

Questions about this technology? Ask a Technology Manager

Download Printable PDF

Professor Jeehwan Kim
Department of Mechanical Engineering, MIT
External Link (
Managed By
Jim Freedman
MIT Technology Licensing Officer - Chemicals, Instruments, Consumer Products
Patent Protection

Graphene-Based Layer Transfer Process For Advanced Cost-Efficient Electronics/Photonics

Provisional Patent Application Filed

Dislocation-Free III-V Integration on a SI Wafer

Provisional Patent Application Filed

Systems and Methods for Graphene Based Layer Transfer

PCT Patent Application WO 2017-044577
Layer-Resolved Graphene Transfer via Engineered Strain Layers
Science , 342(6160): 833-6, Nov. 15, 2013
Principle of direct van der Waals epitaxy of single-crystalline films on epitaxial graphene
Nature Communications, 5(4836):1-7, Sep. 11, 2014


  • Low cost LED fabrication and single and multi-junction solar cells
  • Epitaxial film production for various electronic and photonic devices such as lasers

Problem Addressed

Epitaxial films, crystalline films deposited on a crystalline substrate, are vital for commercial fabrication of electronics. Epitaxial films must be formed on specific substrates, which are often expensive, in order to avoid lattice mismatch. Lattice mismatch can cause defects in and degradation of the electrical and optical properties of epitaxial films. In addition, the substrates cannot be reused as the process for removing epitaxial films degrades the substrates. The need to purchase a new substrate for each epitaxial film constructed dramatically inflates the cost of film production.  


The invention is a method for epitaxial film production without the degradation of the substrate. The expensive substrates are protected from degradation in both the epitaxial film deposition phase and the removal phase, thereby ensuring that the substrate can be reused in the production of additional films. Thus, the cost of epitaxial film production is dramatically reduced by enabling a single substrate to be used in the production of multiple epitaxial films.  


  • Inexpensive method for constructing epitaxial films
  • Reusability of expensive substrates ensured in the epitaxial film production process